| Supplier |
Alfa Chemistry |
| Product # |
ACM2172023-1 |
| CAS # |
2172-02-3 |
| Pricing |
Inquire
|
| Synonyms |
Hafnium tetra-t -butoxide,Hafnium tetrakis(t -butoxide),Tetra-t -butoxyhafnium,Tetrakis(t -butoxy)hafnium
|
| IUPAC Name |
hafnium(4+);2-methylpropan-2-olate
|
| MolecularFormula |
Hf[OC(CH3)3]4
|
| MolecularWeight |
470.94
|
| Application |
Hafnium tert-butoxide [Hf(OtBu)4] is a mononuclear; volatile; and highly promising precursor for the deposition of HfO2 and other hafnium doped thin films by vapor deposition techniques. The deposited films show high dielectric constant suitable for semiconductor devices.
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